Talks and Poster Presentations (with Proceedings-Entry):
D. Platz, G. Pfusterschmied, U. Schmid:
"Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators";
Talk: Eurosensors 2018,
Graz, Österreich;
09-09-2018
- 09-12-2018; in: "Proceedings - Eurosensors 2018, Graz",
MDPI,
(2018),
ISSN: 2504-3900;
1
- 4.
English abstract:
Resonant micro- and nanoelectromechanical systems (MEMS/NEMS) are typically subject
to interaction with a liquid or gaseous environment. Recently, it has been demonstrated that non-
conventional eigenmodes exhibit remarkably high quality factors (Q factors) in liquids. However,
the physical origin of this phenomenon remains elusive. Here we introduce a definition of non-
conventional eigenmodes for cantilever structures and develop a boundary integral method for
describing the interaction of an incompressible viscous fluid and a non-conventional eigenmode of
a MEMS/NEMS resonator. With this framework we are able to study the influence of the mode
shape on the fluid-structure interaction.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.3390/proceedings2130896
Created from the Publication Database of the Vienna University of Technology.