Talks and Poster Presentations (with Proceedings-Entry):
D. Platz, G. Pfusterschmied, U. Schmid:
"Theoretical Framework for modelling the fluid-structure interaction of complex MEMS/NEMS resonator eigenmodes";
Talk: Euromech Colloquium 603,
Cork, Irland;
09-05-2018
- 09-07-2018; in: "Proceedings of the Euromech Colloquium 603",
Universidade do Porto, Reitoria,
(2018),
ISBN: 978-989-746-185-9;
38
- 40.
English abstract:
The quality factor is an important figure of merit for evaluating the performance of MEMS/NEMS devices. Recently, it
has been demonstrated that complex non-conventional eigenmodes exhibit extraordinary high quality factors in liquids. Here, we
present a theoretical framework for the analysis of the interaction between a fluid and complex eigenmodes. We compare the
modelling assumptions of two- and three-dimensional flows and discuss the damping of a two-dimensional plate mode shape in a
fluid environment as an application of the presented framework.
Created from the Publication Database of the Vienna University of Technology.