Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
M. Dorfmeister, B. Kössl, M. Schneider, U. Schmid:
"A Novel Bistable MEMS Membrane Concept Based on an Integrated AlN Thin Film for Switching";
Vortrag: Eurosensors 2018,
Graz, Österreich;
09.09.2018
- 12.09.2018; in: "Proceedings - Eurosensors 2018, Graz",
MDPI,
Vol. 2
(2018),
ISSN: 2504-3900;
S. 1
- 4.
Kurzfassung englisch:
This study reports on a novel bi-stable actuator with an integrated aluminum nitride (AlN)
piezoelectric layer sandwiched between two electrodes. To achieve bistability, the membranes must
exceed a characteristic compressive stress value, also called the critical stress. For this purpose, we
used highly c-axis orientated stress-controlled AlN with a thickness of 400 nm. First experiments
showed, that it is possible to switch between the two stable ground states with at least two
rectangular pulses at a frequency of 80 kHz and with a voltage Vpp of 40 V, resulting in a
displacement of about 10 μm for each switching direction.
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.3390/proceedings2130912
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.