Contributions to Books:
X. Klemenschits, S. Selberherr, L. Filipovic:
"Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review";
in: "Miniaturized Transistors",
L. Filipovic, T. Grasser (ed.);
MDPI,
2019, (invited),
ISBN: 978-3-03921-010-7,
105
- 135.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.3390/books978-3-03921-011-4
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2019/BC2019_Klemenschits_1.pdf
Created from the Publication Database of the Vienna University of Technology.