Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
P. Sadeghi, S. Schmid:
"Reducing surface loss at room temperature in nanomechanicalsilicon nitride resonators";
Poster: Frontiers of Nanomechanical Systems ( FNS/2019 ),
Palm Springs;
10.02.2019
- 14.02.2019; in: "Frontiers of Nanomechanical Systems (FNS/2019)",
(2019),
S. 105.
Kurzfassung englisch:
Quality factors of nanomechanical resonators made of high-stress silicon nitride(SiN) are on the order of several million, due to the tensile-stress induced dissipation dilution effect. Embedding resonators in a phononic crystal[1]and by additionally increasing tensile stress[2]has resulted in record Q-factors of several hundred million.
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.