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Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):

P. Sadeghi, S. Schmid:
"Reducing surface loss at room temperature in nanomechanicalsilicon nitride resonators";
Poster: Frontiers of Nanomechanical Systems ( FNS/2019 ), Palm Springs; 10.02.2019 - 14.02.2019; in: "Frontiers of Nanomechanical Systems (FNS/2019)", (2019), S. 105.



Kurzfassung englisch:
Quality factors of nanomechanical resonators made of high-stress silicon nitride(SiN) are on the order of several million, due to the tensile-stress induced dissipation dilution effect. Embedding resonators in a phononic crystal[1]and by additionally increasing tensile stress[2]has resulted in record Q-factors of several hundred million.

Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.