Talks and Poster Presentations (with Proceedings-Entry):
P. Sadeghi, S. Schmid:
"Reducing surface loss at room temperature in nanomechanicalsilicon nitride resonators";
Poster: Frontiers of Nanomechanical Systems ( FNS/2019 ),
Palm Springs;
2019-02-10
- 2019-02-14; in: "Frontiers of Nanomechanical Systems (FNS/2019)",
(2019),
105.
English abstract:
Quality factors of nanomechanical resonators made of high-stress silicon nitride(SiN) are on the order of several million, due to the tensile-stress induced dissipation dilution effect. Embedding resonators in a phononic crystal[1]and by additionally increasing tensile stress[2]has resulted in record Q-factors of several hundred million.
Created from the Publication Database of the Vienna University of Technology.