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J. Schlarp, E. Csencsics, G. Schitter:
"Optical scanning of a laser triangulation sensor for 3D imaging";
IEEE Transactions on Instrumentation and Measurement, 69 (2020), 6; 3606 - 3613.

In scan-based 3D systems the achievable measurement time is strongly restrained by the moving mass. This limitation can be relaxed, by scanning the optical path instead of moving the entire sensor, such that a higher measurement speed can be achieved. This work deals with the design, control and the measurement results of a scanning triangulation sensor in which the illumination and reflection paths of the sensor are scanned by a fast steering mirror (FSM). The system architecture is determined using ray-tracing simulations, such that the performance of the scanning system can be determined in advance. To scan the area of interest with the FSM, conventional raster trajectories as well as Lissajous trajectories are employed, which provide an early overview of the scan area. For tracking these trajectories, PID and dual tone controllers are used, respectively. Experimental results demonstrate that for both scan trajectories the sample can be captured correctly, with a framerate of one frame per second, a maximum spatial resolution of 130 µm and a field of view of 11.5x18.5 mm.

Precision engineering, Optical sensors, Sensor Systems, Metrology, Optical devices, Ray tracing, Linear feedback control systems

http://dx.doi.org/10.1109/TIM.2019.2933343

https://publik.tuwien.ac.at/files/publik_282494.pdf