Talks and Poster Presentations (with Proceedings-Entry):
D. Brunner, H. W. Yoo, T. Thurner, G. Schitter:
"Data based Modelling and Identification of Nonlinear SDOF MOEMS Mirror";
Talk: SPIE Photonics West 2019,
San Francisco, California, USA;
- 02-07-2019; in: "MOEMS and Miniaturized Systems XVIII",
Accurate modeling of MOEMS mirrors is crucial for their design and fabrication, as well as for proper control within its target applications. This paper proposes a novel identification method using a generalized nonlinear SDOF model of an electrostatically actuated 1D resonant MOEMS mirror solely based on measured scanning trajectories and the current generated by the movement of the comb-drive electrodes. The nonlinear stiffness and damping are identified from a decay measurement while the comb-drive torque and the rotor inertia are derived from an actuated decay measurement, where a constant voltage is applied. The simulation with the identified parameters closely matches the measured frequency response including bifurcations and hysteresis. Furthermore a period-based modified index of agreement is proposed for nonlinear systems showing values of over 0.995 at each period along the decay.
Micro-Opto-Electro-Mechanical System (MOEMS), Resonant scanning mirror, Data based identification, Generalized nonlinear SDOF model, Actuated decay, Comb-drive torque
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
Electronic version of the publication:
Created from the Publication Database of the Vienna University of Technology.