Talks and Poster Presentations (with Proceedings-Entry):
U. Schmid, M. Schneider:
"High Performance Piezoelectric AlN MEMS Resonators for Liquid Sensing and Beyond - The Potential of PiezoMEMS";
Talk: 20th International Conference on Solid State Sensors, Actuators and Microsystems & Eurosensors XXXIII (Transducers & Eurosensors XXXIII),
Berlin, D (invited);
06-23-2019
- 06-27-2019; in: "20th International Conference on Solid State Sensors and Actuators (Transducers 19)",
IEEE,
CFP19SSA-ART
(2019),
ISBN: 978-1-5386-8104-6;
653
- 654.
English abstract:
Piezoelectric MEMS resonators based on advanced
aluminum nitride thin films are a promising and versatile
technology platform to tackle a multitude of sensory
challenges. In this talk, we will give an overview on recent
achievements in this field focusing on potential
applications for e.g. sensing the viscosity and density of
liquids and serving as integrated transducers to push the
performance of buckled membranes.
Created from the Publication Database of the Vienna University of Technology.