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G. Pfusterschmied, Chr. Weinmann, M. Schneider, M. Hospodka, J. Mirwald, B. Hofko, U. Schmid:
"Bestimmung der dynamischen Viskosität von Bitumenderivaten bis 64000 mPa∙s mit piezoelektrischen MEMS-Resonatoren";
Talk: MikroSystemTechnik Kongress 2019, Berlin, D; 2019-10-28 - 2019-10-30; in: "MikroSystemTechnik Kongress 2019 - Proceedings", VDE Verlag GMBH, (2019), ISBN: 978-3-8007-5090-0; 320 - 323.

In this conference proceeding, reusable micro-machined piezoelectric resonators are presented, which are capable to de-termine the viscosity values of super high viscous media with dynamic viscosities up to 64 000 mPa·s. To overcome the high viscous forces, the resonating element is designed such that the 10th order mode of a special vibration mode is excited, to provide sufficient output signal height even under such strong damping conditions. For actuation and sensing, a piezo-electric aluminium nitride (AlN) thin film is used in combination with a tailored electrode design. The comparison of three different bitumen derivatives are presented in a temperature range from 75 to 150°C, demonstrating the high poten-tial of the presented sensor concept for determining of super high viscous liquid properties in harsh environments.