Talks and Poster Presentations (with Proceedings-Entry):
G. Pfusterschmied, Chr. Weinmann, M. Hospodka, B. Hofko, M. Schneider, U. Schmid:
"Sensing Fluid Properties Of Super High Viscous Liquids Using Non-Conventional Vibration Modes In Piezoelectrically Excited Mems Resonators";
Poster: 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Seoul, Korea;
01-27-2019
- 01-31-2019; in: "2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)",
IEEE,
(2019),
735
- 738.
English abstract:
In this paper, reusable micro-machined
piezoelectric resonators are presented, which are
capable to determine the densities and viscosity values
of super high viscous media with dynamic viscosities up
to 64 000 mPa·s. To overcome the high viscous forces,
the resonating element is designed such that the 10th
order mode of a non-conventional vibration mode is
excited, to provide sufficient output signal height even
under such strong damping conditions. For actuation
and sensing, a piezoelectric aluminium nitride thin film
is used in combination with a tailored electrode design.
The comparison of three different bitumen derivatives
are presented in a temperature range from 75 to 150°C,
demonstrating the high potential of the presented
resonator concept for sensing of super high viscous
liquid properties in harsh environments.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/MEMSYS.2019.8870897
Created from the Publication Database of the Vienna University of Technology.