[Zurück]

M. Fuerst, N. Berlakovich, E. Csencsics, G. Schitter:
"Self-Aligning Scanning Shack-Hartmann Sensor for Automatic Wavefront Measurements of High-NA Optics";
Vortrag: IEEE International Instrumentation and Measurement Technology Conference Proceedings I2MTC (2020), Dubrovnik, Kroatien; 25.05.2020 - 28.05.2020; in: "Proceedings of the IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2020)", (2020), 6 S.

Optical parts, such as lenses or mirrors, are often qualified by surface shape metrology. Wavefront measurements allow for a more direct measurement of the performance of an optical part. However, the dynamic range of current wavefront sensors is not sufficient for measuring the wavefront generated by high-NA optical parts. In this paper, a wavefront sensor is combined with a mechatronic positioning system to overcome these limitations by repositioning and reorienting the wavefront sensor. Feedback loops are implemented to ensure a tangential orientation of the wavefront sensor in every measurement position. An experimental setup is constructed and a measurement strategy that compensates for tip and tilt between wavefront and sensor is developed. It is demonstrated that this setup is capable of directly measuring the wavefront of a high-NA optic.

Shack-Hartmann wavefront sensor, Dynamic range extension, Optical metrology, Automatic optical inspection, Quality management

http://dx.doi.org/10.1109/I2MTC43012.2020.9128499

https://publik.tuwien.ac.at/files/publik_289906.pdf