J. Cervenka, H. Ceric, S. Selberherr:
"Three-Dimensional Simulation of Sacrificial Etching";
Proceedings of SPIE, 6589 (2007), 452 - 460.
http://dx.doi.org/10.1117/12.721979Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2007/CP2007_Cervenka_1.pdf