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Publications in Scientific Journals:

J. Cervenka, H. Ceric, S. Selberherr:
"Three-Dimensional Simulation of Sacrificial Etching";
Proceedings of SPIE, 6589 (2007), 452 - 460.



"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1117/12.721979

Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2007/CP2007_Cervenka_1.pdf


Created from the Publication Database of the Vienna University of Technology.