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Zeitschriftenartikel:

S. Ito, M. Poik, E. Csencsics, J. Schlarp, G. Schitter:
"High-speed scanning chromatic confocal sensor for 3-D imaging with modeling-free learning control";
Applied Optics, 59 (2020), 29; S. 9234 - 9242.



Kurzfassung englisch:
This paper presents a scanning system that integrates a chromatic confocal displacement sensor for topography measurement of a surface. To take an advantage of its compactness and reliability, an off-the-shelf chromatic confocal displacement sensor is integrated. Instead of moving the sensor, a galvanometer scanner reflects the optical point to increase the scan speed, and fast and accurate scanning motion is realized by learning without a model. The resulting images are corrected based on a geometric model to compensate for image distortion.


"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1364/AO.399760

Elektronische Version der Publikation:
https://publik.tuwien.ac.at/files/publik_290410.pdf


Erstellt aus der Publikationsdatenbank der Technischen Universitšt Wien.