Zeitschriftenartikel:
S. Ito, M. Poik, E. Csencsics, J. Schlarp, G. Schitter:
"High-speed scanning chromatic confocal sensor for 3-D imaging with modeling-free learning control";
Applied Optics,
59
(2020),
29;
S. 9234
- 9242.
Kurzfassung englisch:
This paper presents a scanning system that integrates a chromatic confocal displacement sensor for topography measurement of a surface. To take an advantage of its compactness and reliability, an off-the-shelf chromatic confocal displacement sensor is integrated. Instead of moving the sensor, a galvanometer scanner reflects the optical point to increase the scan speed, and fast and accurate scanning motion is realized by learning without a model. The resulting images are corrected based on a geometric model to compensate for image distortion.
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1364/AO.399760
Elektronische Version der Publikation:
https://publik.tuwien.ac.at/files/publik_290410.pdf
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.