Patents:
M. Jandak, M. Schneider, U. Schmid:
"MEMS Sensors with Selectively Adjusted Damping of Suspension";
Patent: USA,
No. Us 10822225b2;
submitted: 06-29-2017,
granted: 11-03-2020.
English abstract:
A micro-electro-mechanical systems (MEMS) device and method of fabricating the MEMS device are disclosed. The MEMS device comprises a substrate, one or more suspension structures connected to the substrate, one or more metallized layers on the one or more suspension structures, and one or more sense structures connected to the one or more suspension structures. The one or more metallized layers provide selectively adjusted damping of the one or more suspension structures.
Created from the Publication Database of the Vienna University of Technology.