Beiträge in Tagungsbänden:
G. Antonacci, J. Goyvaerts, H. Zhao, B. Baumgartner, B. Lendl, R. Baets:
"Ultra-sensitive and compact on-chip gas sensor on a silicon nitride photonic integrated circuit";
in: "Proceedings Volume 11285, Silicon Photonics XV",
herausgegeben von: SPIE;
SPIEdigitallibrary,
San Francisco,
2020,
S. 112851E-1
- 112851E-6.
Kurzfassung englisch:
We demonstrate a compact on-chip gas sensor based on a SiN photonic integrated circuit providing an estimated detection limit of 0.1ppm for a variety of gas vapors, including IPA, ethanol and acetone. The sensor consists of an integrated Mach-Zehnder interferometer having one arm coated with an absorptive mesoporous layer to enhance the interaction of the gas vapors with the waveguide evanescent field. Gas detection is accomplished by monitoring the spectral shift of the output signal induced by a change in the effective refractive index of the coated waveguide. Results pave the way to novel integrated solutions for environmental safety monitoring.
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1117/12.2557047
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.