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I. Burgstaller, S. Ito, H. Fujimoto, G. Schitter:
"Development of Reluctance Actuator for High-Precision Positioning and Scanning Motion";
Talk: IEEE International Conference on Mechatronics 2021, Kashiwa, Japan; 2021-03-07 - 2021-03-09; in: "Proceedings of the IEEE International Conference on Mechatronics 2021", (2021).

To utilize the high force of reluctance actuators for high-precision fast scanning motion, this paper presents a nanopositioner that integrates two reluctance actuators for a bidirectional force and investigates its achievable performance. A challenge of reluctance actuators is their force-current nonlinearity. To model it accurately for compensation, a displacement sensor for real-time motion control is utilized to measure the force curves. A model based on the experiments is used to compensate for the nonlinearity by means of feedback linearization. It successfully decreases a total harmonic distortion of sinusoidal scanning trajectories from 25% to 2.6 %, which is further improved to 1.45% by linear position feedback control. The achieved bandwidth and the positioning resolution are 335 Hz and 2 nm. Additionally, feedforward control is designed, and sinusoidal scanning motions at 1 Hz and 100 Hz are evaluated for a feasibility study to find out challenges and potentials of reluctance actuators.

high-precision actuators, nanopositioning, reluctance actuator, feedback linearization

http://dx.doi.org/10.1109/ICM46511.2021.9385649

https://publik.tuwien.ac.at/files/publik_295428.pdf