[Back]


Publications in Scientific Journals:

A. Toifl, F. Rodrigues, L.F. Aguinsky, A. Hössinger, J. Weinbub:
"Continuum Level-Set Model for Anisotropic Wet Etching of Patterned Sapphire Substrates";
Semiconductor Science and Technology, 36 (2021), 4; 045016-1 - 045016-12.



"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1088/1361-6641/abe49b

Electronic version of the publication:
https://www.iue.tuwien.ac.at/pdf/ib_2021/JB2021_Toifl_1.pdf


Created from the Publication Database of the Vienna University of Technology.