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J. Hafner, M. Teuschel, D. Disnan, M. Schneider, U. Schmid:
"Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators";
Materials Research Letters, 9 (2021), Issue 4; 195 - 203.

Piezoelectricity in ferroelectrics arises from electrostriction biased by their spontaneous polarisation, which can be enhanced through a bias-induced polarisation. Doing so, the piezoelectric response can be tuned and significantly enhanced. In this study, the ferroelectric polymer P(VDF-TrFE) was used to electro-mechanically excite a silicon microcantilever. Using this device, we demonstrate that a bias-induced polarisation improves the piezoelectric response of P(VDF-TrFE). To distinguish between the linear piezoelectric and quadratic electrostrictive effect, lock-in measurements were performed in order to separate the characteristic frequency response of both electro-mechanical phenomena. This work shows the potential for MEMS devices having controllable actuating and sensing properties.

The non-linear nature of the strong electrostrictive effect observed in ferroelectric polymers was used to enhance and control its piezoelectric activity by an electric field. A large and tunable piezoelectric response was verified in polymer-based MEMS resonators, proving the ability to tailor their actuating and sensing properties.

http://dx.doi.org/10.1080/21663831.2020.1868593