D. Wertjanz, T. Kern, E. Csencsics, G. Stadler, G. Schitter:
"Compact scanning confocal chromatic sensor enabling precision 3-D measurements";
Applied Optics, 60 (2021), 25; S. 7511 - 7517.

Kurzfassung englisch:
This paper proposes a compact and lightweight scanning confocal chromatic sensor (SCCS) for robot-based precision three-dimensional (3-D) surface measurement applications. The integrated system design includes a 2-D fast steering mirror (FSM) to manipulate the optical path of a high precision 1-D confocal chromatic sensor (CCS). A data-driven calibration procedure is used to accurately combine the FSM deflection angles and the correspondingly measured distances to the sample surface in order to obtain a correctly reconstructed 3-D image. Lissajous scan trajectories are applied to enable efficient scans of the sample surface. The SCCS provides 3-D images at frame rates of up to 1 fps and a measurement volume of 0.35×0.25×1.8mm3, as well as the measurement of arbitrary regions of interest. Using a calibration standard including structures with defined sizes, the lateral and axial resolutions are determined to 2.5 µm and 76 nm, respectively.

"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)

Elektronische Version der Publikation:

Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.