Zeitschriftenartikel:
T. Řiháček, M. Horák, T. Schachinger, F. Mika, M. Matějka, S. Krátký, T. Fořt, T. Radlička, C. Johnson, L. Novák, B. SedŽA, B. McMorran, I. Müllerová:
"Beam shaping and probe characterization in the scanning electron microscope";
Ultramicroscopy,
225
(2021),
S. 1
- 9.
Kurzfassung englisch:
Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning
electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction
pattern can be passed through the objective lens and projected onto the specimen, or an intermediate
aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing
the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity
of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.
Schlagworte:
Electron diffraction SEM Electron beam structuring Spot shape measurement Electron vortex beam
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.ultramic.2021.113268
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.