Publications in Scientific Journals:
L.F. Aguinsky, G. Wachter, P. Manstetten, F. Rodrigues, M. Trupke, U. Schmid, A. Hössinger, J. Weinbub:
"Modeling and Analysis of Sulfur Hexafluoride Plasma Etching for Silicon Microcavity Resonators";
Journal of Micromechanics and Microengineering,
31
(2021),
12;
125003-1
- 125003-9.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1088/1361-6439/ac2bad
Electronic version of the publication:
https://www.iue.tuwien.ac.at/pdf/ib_2021/JB2021_Aguinsky_1.pdf
Created from the Publication Database of the Vienna University of Technology.