Contributions to Books:
T. Reiter, X. Klemenschits, L. Filipovic:
"Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash Memory";
in: "Proceedings of the 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)",
B. Cretu (ed.);
IEEE,
2021,
ISBN: 978-1-6654-3745-5,
1
- 4.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/EuroSOI-ULIS53016.2021.9560693
Electronic version of the publication:
https://www.iue.tuwien.ac.at/pdf/ib_2021/BC2021_Reiter_1.pdf
Created from the Publication Database of the Vienna University of Technology.