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H. Watanabe, T. Chang, M. Schneider, U. Schmid, C. Chen, S. Iida, D. Yamane, H. Ito, K. Machida, K. Masu, M. Sone:
"Effective Young´s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency";
electrochem, 2 (2021), 216 - 223.

Ti/Au multi-layered micro-cantilevers with complex three-dimensional structures used as
micro-components in micro-electromechanical systems (MEMS) sensors were prepared by lithog-
raphy and electrodeposition, and the effective Young´s modulus was evaluated by the resonance
frequency method and finite element method simulation. Effects of the constraint condition at the
fixed-end of the micro-cantilever and the temperature dependency of the effective Young´s modulus
were studied. Three types of the constraint at the fixed-end were prepared, which were normal type
(constraining only bottom surface of the fixed-end), block type (constraining both top and bottom
surfaces), and bridge type (top surfaces covering with a bridge-like structure). The temperature
dependency test was conducted in a temperature range from 150 to 300 ◦C in a vacuum chamber. An
increase in the effective Young´s modulus was observed as the constraint condition became more
rigid, and the effective Young´s modulus merely changed as the temperature varied from room
temperature to 300 ◦C.

http://dx.doi.org/10.3390/electrochem2020015