Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
D. Platz, A. Gesing, U. Schmid:
"Spectral Response of MEMS Plate Resonators Exhibiting Non-conventional Vibrational Modes in Fluids";
Vortrag: SMSI 2021 - Sensor and Measurement Science International Digital Conference,
online;
03.05.2021
- 06.05.2021; in: "SMSI 2021 Conference - Sensor and Measurement Science International Digital Conference",
VDE,
(2021),
S. 143
- 144.
Kurzfassung englisch:
Understanding of the fluid-structure interaction between a MEMS resonator and a surrounding fluid is
key for understanding and predicting the dynamics of MEMS resonators in fluids. Here, we present a
numerical method for modelling the fluid-structure interaction between a viscous fluid and vibrational
eigenmodes of a plate-like MEMS resonator. The dynamics of the MEMS resonator is determined using
a finite element method while the fluid flow is obtained from a boundary integral formulation. With this
method we compute the spectral response of MEMS plate resonators in fluids.
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.5162/SMSI2021/B6.4
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.