Talks and Poster Presentations (with Proceedings-Entry):
D. Platz, A. Gesing, U. Schmid:
"Spectral Response of MEMS Plate Resonators Exhibiting Non-conventional Vibrational Modes in Fluids";
Talk: SMSI 2021 - Sensor and Measurement Science International Digital Conference,
online;
05-03-2021
- 05-06-2021; in: "SMSI 2021 Conference - Sensor and Measurement Science International Digital Conference",
VDE,
(2021),
143
- 144.
English abstract:
Understanding of the fluid-structure interaction between a MEMS resonator and a surrounding fluid is
key for understanding and predicting the dynamics of MEMS resonators in fluids. Here, we present a
numerical method for modelling the fluid-structure interaction between a viscous fluid and vibrational
eigenmodes of a plate-like MEMS resonator. The dynamics of the MEMS resonator is determined using
a finite element method while the fluid flow is obtained from a boundary integral formulation. With this
method we compute the spectral response of MEMS plate resonators in fluids.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.5162/SMSI2021/B6.4
Created from the Publication Database of the Vienna University of Technology.