Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
A. Gesing, D. Platz, U. Schmid:
"Quality Factors of MEMS Plate Modes in Fluids";
Vortrag: Mikrosystemtechnik-Kongress 2021,
Ludwigsburg, Deutschland;
08.11.2021
- 10.11.2021; in: "Mikrosystemtechnik-Kongress 2021",
VDE-Verlag,
(2021),
ISBN: 978-3-8007-5656-8;
Paper-Nr. D5.2,
4 S.
Kurzfassung englisch:
The prediction of quality factors of MEMS plate resonators immersed in fluids requires new methods since most existing
methods are based on Euler-Bernoulli beam theory. Here, we present a novel numerical method for computing the spectral
response of MEMS plate resonators in fluids. We model the plate as a thin Kirchhoff plate and use a non-conformal finite
element method to solve the equation of motion which includes the fluid-structure interaction with a viscous fluid. We
investigate the convergence behavior of the proposed method and present numerical examples for MEMS beam and plate
resonators in water.
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.