Publications in Scientific Journals:
T. Reiter, X. Klemenschits, L. Filipovic:
"Impact of Plasma Induced Damage on the Fabrication of 3D NAND Flash Memory";
Solid-State Electronics (invited),
192
(2022),
108261-1
- 108261-9.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.sse.2022.108261
Electronic version of the publication:
https://www.iue.tuwien.ac.at/pdf/ib_2022/JB2021_Reiter_1.pdf
Created from the Publication Database of the Vienna University of Technology.