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L. Filipovic:
"Reliability and Stability of MEMS Microheaters for Gas Sensors";
Vortrag: IEEE International Integrated Reliability Workshop (IIRW), online (eingeladen); 04.10.2021 - 28.10.2021; in: "2021 IEEE International Integrated Reliability Workshop (IIRW)", (2021), ISBN: 978-1-6654-1794-5.

Before fabrication, sensors first must be designed,
simulated, and optimized using modeling and simulation tools
in order to reduce the manufacturing costs associated with the
prototype development cycle. Usually, these simulations include
electro-thermal-mechanical analysis to ensure that the power
consumption and mechanical stability of the sensor is appropriate
for the desired application. Here, we present the means to analyze
the mechanical stability of new sensor designs which contain a
microheater within a MEMS membrane as a critical component.
These include chemiresistive semiconductor metal oxide
and non-dispersive infrared based gas sensors. The presented
simulation approaches are then applied in order to analyze a
novel microheater array design, which is intended to provide
multiple temperatures within the same sensing area, resulting in
high thermal gradients in the microheater´s metal film. We show
that the thermo-migration effect in these devices is much higher
than electro-migration effect and should likely not be ignored
during the design and simulation cycle. Especially as the thin
film layers are further scaled and miniaturized, the effect of
vacancy migration under a thermo-migration force may become
an increasing concern to the sensor´s reliability in future devices.

Gas Sensor, Semiconductor Metal Oxide, Infrared Emitter, Microheater, Reliability, Stability

http://dx.doi.org/10.1109/IIRW53245.2021.9635162