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Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):

D. Brunner, H. W. Yoo, T. Thurner, G. Schitter:
"Data based Modelling and Identification of Nonlinear SDOF MOEMS Mirror";
Vortrag: SPIE Photonics West 2019, San Francisco, California, USA; 02.02.2019 - 07.02.2019; in: "MOEMS and Miniaturized Systems XVIII", SPIE, 10931 (2019), 11 S.



Kurzfassung englisch:
Accurate modeling of MOEMS mirrors is crucial for their design and fabrication, as well as for proper control within its target applications. This paper proposes a novel identification method using a generalized nonlinear SDOF model of an electrostatically actuated 1D resonant MOEMS mirror solely based on measured scanning trajectories and the current generated by the movement of the comb-drive electrodes. The nonlinear stiffness and damping are identified from a decay measurement while the comb-drive torque and the rotor inertia are derived from an actuated decay measurement, where a constant voltage is applied. The simulation with the identified parameters closely matches the measured frequency response including bifurcations and hysteresis. Furthermore a period-based modified index of agreement is proposed for nonlinear systems showing values of over 0.995 at each period along the decay.

Schlagworte:
Micro-Opto-Electro-Mechanical System (MOEMS), Resonant scanning mirror, Data based identification, Generalized nonlinear SDOF model, Actuated decay, Comb-drive torque


"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1117/12.2508429

Elektronische Version der Publikation:
https://publik.tuwien.ac.at/files/publik_282507.pdf


Erstellt aus der Publikationsdatenbank der Technischen Universitšt Wien.