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Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):

E. Csencsics, T. Wolf, G. Schitter:
"Speckle Simulation Tool for the Design of Laser-based Displacement Sensors";
Vortrag: SPIE Optical Metrology Conference 2021, Munich, Germany; 21.06.2021 - 25.06.2021; in: "SPIE Optical Measurement Systems for Industrial Inspection XII", SPIE, 11782 (2021), 117820 S.



Kurzfassung englisch:
This paper presents the development of a versatile, accurate and efficient speckle simulation tool for the design of laser-based displacement sensors, capable of handling objective as well as subjective speckles. The simulation tool integrates the statistical nature of speckles with the deterministic properties of ray-tracing simulations, providing a reliable estimation of the performance of laser and/or speckle-based sensors in the design phase, even for more complex optical assemblies. It enables the calculation of several simulation outputs in order to determine the best performing system configuration for a given requirement and measurement principle. To validate the simulation results, they are compared against the experimental data of four designed laser-speckle based sensor setups for measuring in- and out-of-plane displacement of a target as well as against analytical relations for describing speckle pattern translation for simple geometries. With resulting simulation errors of less than 2 μm rms for in-plane (output: correlation peak shift) and 2.6 μm for out-of-plane displacements (output: center of gravity shift) for an integrated laser sensor geometry, the good accuracy of the speckle simulation tool is demonstrated.

Schlagworte:
Laser speckles, Speckle simulation, Triangulation sensor, Displacement measurement, Surface tracking, In-process measurement, Design tool


"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1117/12.2592596

Elektronische Version der Publikation:
https://publik.tuwien.ac.at/files/publik_296573.pdf


Erstellt aus der Publikationsdatenbank der Technischen Universitšt Wien.